High-precision thickness measurement of electrically conductive films
The TFG6220 capacitive system measures the thickness of electrically conductive films, e.g. battery film, with maximum precision. A vacuum device sucks in the object to be measured, smooths it and thus ensures optimum, wrinkle-free support. In this way, the measurement can be performed with the greatest possible precision. The system is used in quality control for offline sample inspections. The TFG6220 comes pre-assembled and is ready for immediate use
Characteristics
- Fast offline inspection of the film thickness
- Resolution: 10 nm
- High repeatability: 1 µm
- Possible film thickness: < 1 mm
- High-precision results due to automatic smoothing of the film via vacuum
- An integrated measuring insert enables simple referencing before thickness measurement
- Simple operation/visualization via the freely accessible sensorTOOL software
Precise testing for reliable quality
The TFG6220 consists of a measuring bracket including sensors and a capaNCDT controller. The thickness is calculated by combining the signals from the two capacitive sensors. Automatic smoothing of the measuring object is realized via an externally connected vacuum device. This achieves micrometer-precise results.
The permanently installed capacitive sensor (1) in the upper area of the measuring bracket measures the distance to the measuring object (2). The measuring insert (3) provides a reference surface against which the object being measured is drawn by vacuum and held in place. The capacitive sensor in the lower area (4) measures on the measuring insert and compensates for the mechanical offset of the contact surface.